Zirconia pressure sensors: from nanopowders to device

Robert R. Piticescu 1Marko Hrovath 2Darko Belavic 3Ana Ionascu 4Barbara Malic 2Adrian M. Motoc 1

1. Institute for Non-ferrous and Rare Metals, 102 Biruintei Blvd., Pantelimon 73957, Romania
2. Jozef Stefan Institute, Jamova 39, Ljubljana, Slovenia
3. Hipot Hyb, Sentjernej, Slovenia
4. IPEE SA, Albesti 14, Curtea de Arges, Romania

Abstract

Yttria doped zirconia nanopowders have been obtained using the hydrothermal procedure starting from soluble inorganic costs. The mechanisms and kinetics of the process have been studied to obtain high purity powders with crystalline size in the range 4 to 22 nm and specific surface near 200 m2/g.
These powders have been have been used to obtain membranes with controlled thickness and densities over 95% from the theoretical value by the tape casting technique using organic binders, dispersants and surfactants. The influence of the additives and sintering regime on the density and microstructure of membranes has been studied.
Different types of ruthenates pastes were used to obtain thick resistive films on the zirconia membranes and interactions between the substrate and membranes were studied. The gauge characteristics of the device are finally discussed and possibilities for applications as mechanical pressure sensors with high sensitivity.

 

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Presentation: invited oral at E-MRS Fall Meeting 2003, Symposium F, by Robert R. Piticescu
See On-line Journal of E-MRS Fall Meeting 2003

Submitted: 2003-05-20 18:05
Revised:   2009-06-08 12:55