Analysis of stress in buried Ge layers by means of X-ray fluorescence
|Iraida N. Demchenko 2, Krystyna Lawniczak-Jablonska 2, Konstantin Zhuravlev 1, Marina Chernyshova 2, Edyta Piskorska 2, Monika S. Walczak 2, Marcin Klepka 2|
1. Institute of Semiconductor Physics SB RAS, pr. Lavrentieva 13, Novosibirsk 630090, Russian Federation
The use of transmission EXAFS for concentrated systems is well established. In some cases, when the systems under investigation become increasingly dilute in the absorbing atom there is a point where the signal to noise (S/N) ratio favors alternative techniques which measure signals characteristic of the absorbing species (X-Ray fluorescence and Auger electron detection, for example). Auger emission and fluorescence are competing processes. Their relative strengths depend on the atomic number of the absorber. In light elements Auger emission is more probable, while for heavy elements fluorescence becomes more likely.
Presentation: poster at E-MRS Fall Meeting 2004, Symposium D, by Iraida N. Demchenko
See On-line Journal of E-MRS Fall Meeting 2004
Submitted: 2004-07-15 16:16 Revised: 2009-06-08 12:55