Method of Manganese co-doping of LT ZnO films

Aleksandra Wójcik 1Marek Godlewski 1,2Rafał Jakieła 1Marcin Klepka 1Morad Abouzaid 3Pierre Ruterana 3Roman Minikayev 1Wojciech Paszkowicz 1

1. Polish Academy of Sciences, Institute of Physics, al. Lotników 32/46, Warszawa 02-668, Poland
2. Cardinal Stefan Wyszynski University, College of Science, Deptartment of Mathematics and Natural Sciences, Warszawa, Poland
3. SIFCOM, UMR6176, CNRS-ENSICAEN, 6 Bld Maréchal Juin, Caen 14050, France


Lately various methods of doping of ZnO films by Mn have been investigated. In the presented work we used Atomic Layer Deposition to grow ZnO at low temperature (LT) and we studied procedures of doping of these films with Mn ions during the growth process. LT growth conditions were selected to minimize Mn diffusion and formation of various Mn-related oxides. Mn is know to be a fast diffuser in ZnO, which results often in highly inhomogeneous doping, formation of foreign phases and of Mn precipitates. We demonstrate that most of these effects can be avoided by an appropriate selection of growth conditions and by post-growth annealing. The ALD grown LT ZnMnO films show fairly homogeneous in-plane and in-depth Mn content, as we conclude from SIMS, TEM, EPMA and X-ray investigations. These films do not show responses due to inclusions of foreign phases of MnxOy in magnetic investigations.

Related papers
  1. Nanoparticles for medical imaging 
  2. The effect of annealing on properties of Europium doped ZnO nanopowders obtained by a microwave hydrothermal method
  3. Microwave conductivity of ZnO:Co and ZnO:Cu thin films with nano-size metallic Co/Cu inclusions.
  4. Tb3+ ion luminescence enhancement in yttria host lattice obtained via microwave hydrothermal process
  5. Quantum semiconductor nanostructures for applications in biology and medicine -development and commercialisation of new generation devices for molecular diagnostics on the basis of new Polish semiconductor devices
  6. Defect distribution along needle-shaped PrVO4 single crystals grown by the slow-cooling method
  7. X-ray diffraction studies of (Pb,Cd)Te solid solution – possible new material for thermoelectric applications
  8. Hexagonal MnTe with NiAs structure: thermal expansion coefficients and exchange striction
  9. Physical properties of unique ZnO single crystals from Oława Foundry
  10. The influence of growth atmosphere on the self-selection of the grains during ZnO crystal growth
  11. New Ca10Li(VO4)7 laser host: growth and properties
  12. Hydrothermal growth of ZnO nanorods for solar cells applications
  13. Epitaxial growth and characterization of zinc oxide nanorods obtained by the hydro-thermal method
  14. Growth of zinc oxide and dielectric films using Atomic Layer Deposition method from organic precursors
  15. Up-conversion and down-conversion processes observed in Er3+, Yb3+ and Mn2+ doped ZnAl2O4 nanoparticles
  16. Synthesis and properties of up-converted NaYF4: Er, Yb nanoparticles for biomedical applications
  17. Structural, morphological and optical properties of ZnAl2O4 nanoparticles co-doped with Er3+and Yb3+ prepared by combustion aerosol synthesis.
  18. Synthesis and properties of NaYF4: Er, Yb, Gd nanoparticles with and without SiO2 coating for biomedical applications.
  19. Designing biosensors based on semiconductor nanoparticles for an early detection of neurodegenerative diseases.
  20. High-pressure diffraction study of structural and elastic properties of zircon-type and scheelite-type RVO4 (R = Nd, Eu)
  21. Elastic properties of dysprosium orthovanadate: An in-situ powder-diffraction study
  22. Thermal expansion of Si3N4 and Ge3N4
  23. Rezonansowe badania fotoemisyjne ferromagnetycznych warstw ZnCoO
  24. Resonant photoemission study of Sm atoms on ZnO surface
  25. Low-temperature expansion of metastable Pb1-xCdxTe solid solution
  26. Mangan w warstwach ZnMnO hodowanych metodą osadzania warstw atomowych
  27. ZnO and core/shell ZnO/ZnS nanofibers: Characterization and applications
  28. Lokalne otoczenie atomów kobaltu w cienkich warstwach ZnCoO
  29. Investigation of InN layers grown by molecular beam epitaxy on Si or GaN templates
  30. Structural properties of InAlN thin layers for HEMT applications
  31. Low frequency noise measurements in InN films
  32. The microstructure and properties of InN layers
  33. Contactless electroreflectance of ZnSe layers grown by atomic layer epitaxy
  34. Role of threading dislocations on Indium distribution in InGaN alloys
  35. Optical properties of InN grown on Si(111) substrate
  36. Ferromagnetism in transition-metal doped ZnS
  37. Electrical and optical properties of zinc oxide layers obtained by Atomic Layer Deposition
  38. Zinc oxide grown by Atomic Layer Deposition - a material for novel 3D electronics
  39. Dimethylzinc and diethylzinc as precursors for monocrystalline zinc oxide grown by Atomic Layer Deposition
  40. Thin films of ZnS and ZnSe by Atomic Layer Deposition for light sensor applications
  41. Photovoltaic cells based on nickel phthalocyanine and zinc oxide formed by atomic layer deposition
  42. Effects related to deposition temperature of ZnCoO films grown by Atomic Layer Deposition – uniformity of Co distribution, structural, electric and magnetic properties
  43. Electronic and magnetic properties of Co-doped ZnO: first principles study
  44. Pressure dependence of lattice parameter of Gadolinium Gallium Garnet crystals
  45. Lattice parameters of hard materials in the low-temperature range
  46. Lattice parameters of a wurtzite-type (Zn,Mg)Se crystal as a function of temperature
  47. Rietveld refinement for Li2Si2O5 doped with vanadium
  48. High-pressure diffraction study of α and β Ge3N4
  49. Effect of annealing on the structure and microstructure of Pr doped ZrO2-Y2O3 nanocrystals
  50. Raman spectroscopy and magnetic properties of bulk Zn0984Co0.016O crystal
  51. Phase composition study of natural minerals used as a source of white pigment production
  52. Synthesis of doped ZnO nanopowders in microwave hydrothermal reactors
  53. Synthesis of Al doped ZnO nanopowders and their enhanced luminescence
  54. How we can stimulate intra-shell emissions of rare earth and transition metal ions in thin films and in nanoparticles
  55. ZnO thin films for organic/inorganic heterojunctions
  56. Combining microwave and pressure techniques for hydrothermal synthesis of ZnO and ZrO2 nanopowders doped with a range of metal ions
  57. Luminescence properties of zinc oxide nanopowders doped with Al ions obtained by the hydrothermal and vapour condensation methods.
  58. Optimisation of parameters of a dynamic penalty function for a test example of powder pattern indexing
  59. EXAFS investigation of the local atomic structure of di-alanino acid derivative of protoporphyrin IX
  60. Electronic structure of Mn atoms in (Ga,Mn)As layers modified by high temperature annealing
  61. Identification of Mg based phases in ilmenites by X-ray absorption spectroscopy
  62. Wide band-gap II-VI semiconductors for optoelectronic applications
  63. Influence of high temperature annealing on the local atomic structure around Mn atoms and magnetic properties of (Ga,Mn)As layers
  64. Low temperature ZnMnO by ALD
  65. ZnMnO Films grown by Atomic Layer Deposition with uniform Mn distribution
  66. Effect of annealing on electrical properties of low temperature ZnO films
  67. Doping of ZnO nanopowders with Mn, Ni and Cr In an ultrasound and microwave driver hydrothermal reaction
  68. Substrate effect on the ground state of the magnetic order in NSMO/YBCO superlattices
  69. Time-resolved ODMR investigations of II-VI based DMS heterostructures
  70. Ferromagnetism in ZnO:Mn thin films deposited by PEMOCVD
  71. Photoluminescence of ZnO films studied by femptosecond sapphire:Ti laser
  72. Formation of precipitates in Mn doped ZnO layers deposited by magnetron sputtering
  73. The structure of nucleation Zn(Al)O layers for transparent metal oxide application
  74. First-principles calculations of the optical band-gap properties of Mg1-xZnxO alloys
  75. Theoretical studies of ZnS1-xOx alloy band structures
  76. Structure properties of bulk ZnO crystals
  77. Magnetic anisotropy and structural properties of ferromagnet/MgO/ferromagnet system
  78. Two color spectroscopy of ZnSe:Cr
  79. Ferromagnetism of In1-XMnXSe and behaviour of excess Mn in InSe crystal
  80. FE and MD simulation of InGaN QD formation induced by stress field of threading dislocations
  81. Photo-EPR studies of charge tunneling processes in CdxZn(1-x)Se:Fe,Cr (0 ≤ x ≤ 0.3) crystals
  82. Strain Relaxation Effect on the Properties of Ultra Thin ZnO Film on Sapphire (0001) Substrates by Pulsed Laser Deposition
  83. Luminescence of CdMnTe Crystals in Magnetic Field
  84. Luminescence of doped nanoparticles of wide band gap II-VI compounds
  85. Doping of ZnO nanopowders with Mn and Cr in an ultrasound and microwave driven hydrothermal reaction
  86. Rietveld refinement for polycrystalline indium nitride
  88. Low and high indium fluctuation in MOCVD grown InGaN/GaN as determined by quantitative HRTEM
  89. Relationship between condition of deposition and properties of W-Ti-N thin films prepared by reactive magnetron sputtering
  90. Finite element modelling of nonlinear elastic and piezoelectric properties of InN and InGaN QDs
  91. Promising high quality short period Fe/Fe-N multilayers deposited by the sputtering
  92. Structural analysis of the behaviour of the ultrathin AlN capping layer interface during the RE implantation and annealing of GaN for electroluminescence applications
  93. Energy and electronic structure of gallium and nitrogen interstitials in GaN Tilt Boundaries
  94. Investigation of InN layers grown by MOCVD and MBE using analytical and high resolution TEM
  95. Interfacial diffusion and precipitation in rf magnetron sputtered Mn doped ZnO layers
  96. The atomic configuration of tilt grain boundaries around <0001> in GaN
  97. Structural and Magnetic Properties of Cr/Gd Multilayers Deposited on Sapphire and MgO Substrates
  98. First principles study of electronic structure of InN and AlN substitution atomic layers embedded in GaN
  99. Full-potential study of d-electrons effects on the electronic structure of wurtzite and zinc-blende InN
  100. Image processing of HREM micrograph for determination size distribution of Co nanocrystals in Cu matrix
  101. Quantitative study of Cd atoms distribution in CdTe/ZnTe quantum dots superlattice by HRTEM
  102. X-ray diffraction studies of thermal-expansion with the use of 1D detectors installed at synchrotron beamlines
  103. Sensitivity of a genetic algorithm to the mutation rate parameter value: results for a crystallographic test
  104. Analysis of stress in buried Ge layers by means of X-ray fluorescence
  105. X-ray fluorescence detection of iron in diaminoacid derivatives of protoporhyrin IX.
  106. Rietveld refinement of powder diffraction data collected with a laboratory diffractometer equipped with a linear X-ray detector
  107. Phase relationships in annealed Cu-Al-O layers
  108. Growth and characterization of thin films of ZnO by Atomic Layer Epitaxy
  109. Dynamics of spin interactions in II-Mn-VI semiconductors studied with time-resolved optically detected magnetic resonance
  110. Influence of n-type doping on light emission properties of GaN layers and GaN-based quantum well structures
  111. The atomic structure of defects formed during doping of GaN with rare earth ions
  112. Transmission electron microscopy structural investigations of Tm implanted GaN
  113. Area detector as a tool to study properties of the magnetic multilayers by the neutron scattering
  114. Influence of hydrogen adsorption on magnetic properties of Fe films and multilayers
  115. Fe photoionization transition in ZnSSe:Fe crystals - photo-ESR studies
  116. Study of photo- and electro-luminescence related with Er3+ ions in GaN:Er
  117. Quantitative transmission electron microscopy investigation of localised stress in heterostructures
  118. In-depth and in-plane profiling of InGaN-based laser diodes and heterostructures
  119. Cathodoluminescence study of n-type doped GaN epilayers and GaN/InGaN quantum well structures
  120. Compensation mechanisms in magnesium doped GaN
  121. Optical and magnetic resonance investigations of ZnO crystals doped with transition metal ions
  122. Optical and ODMR study of GaN-based HEMT structures
  123. Modelling of indium rich clusters in MOCVD InGaN/GaN multilayers
  124. Transmission electron microscopy and X-ray diffraction study of α'-Al2 CO crystals
  125. Photo-ESR and optical studies of Cr photoionization transition in CdZnSe:Cr crystals
  126. Diamond as X-ray Wavelength Standard for Thermal-Expansion Studies Using Synchrotron Sources
  127. X-Ray Study of Lattice Parameters of GaN in a Broad Temperature Range
  128. Luminescent properties of wide bandgap materials at room temperature

Presentation: Poster at E-MRS Fall Meeting 2006, Symposium E, by Marek Godlewski
See On-line Journal of E-MRS Fall Meeting 2006

Submitted: 2006-05-19 14:27
Revised:   2013-02-28 15:04
© 1998-2018 pielaszek research, all rights reserved Powered by the Conference Engine