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- Chris Hodson

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phone: +44-1934-837000
fax: +44-1934-837001
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interest(s):

Affiliation:


Oxford Instruments Plasma Technology

address: North End, Yatton, Bristol, BS49-4AP, United Kingdom
phone:
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Participant:


E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:

Publications:


  1. SiO2 and Si3N4 Films by Remote Plasma Enhanced Atomic Layer Deposition



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