CdHgTe epitaxial films (EF) used in IR-detectors have to be quenched after annealing in order to control the p-type carrier con-centrations. Structural, physical, optical and mechanical properties of CdHgTe/CdTe grown by ISOVPE after different cooling modes were investigated (in air, water, oil, and liquid nitrogen). Thin poly-crystal layer (~3 nm) including amorphic structure forms on the sur-face during high cooling rates. Thin polycrystalline layer are formed at cooling in air at low rates. The oil-quenching in thin nearsurface layer leads to the block structure. The water-quenching of the films leads to the surface cracks appearance. The dependence of mechani-cal properties from a mode of cooling is revealed. The reflection spectra (77 K) in the range of 2-15 mkm for four groups of EF samples with different cooling routine have similar EF structure with a peaks near 0.27, 0.24, 0.22, 0.20, 0.18, 0.16, 0.14 and 0,12 eV. Defects con-centration in undersurfacing layers of EF increase in order of cooling in air, oil, and liquid nitrogen. Decreasing of reflection coefficient and some smoothing of features of spectrum take place in the same order. The revealed changes of structure and properties of EF are connected with generation and diffusion of defects in undersurfacing layers.

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