STRUCTURAL AND OPTICAL PROPERTIERS OF IRON SILICIDE FORMED BY ION BEAM MIXING
|Ayache Rachid 2, A. Bouabellou 3, F. Eichhorn 1, E. Richter 1|
1. Forschungszentrum Rossendorf (FZR), Dresden 01314, Germany
Fe films of 150 nm deposited onto P-type Si(111) substrates were irradiated at room temperature (RT) with 300 KeV Xe+ ions with a dose of 5x1016 Xe+/cm2. After Xe-ion beam mixing, the samples were annealed in a N2 atmosphere at 850 ˚C for different times. The obtained samples were analyzed by using Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD), Raman spectroscopy and Photoluminescence (PL) techniques. The experimental results show that the Xe irradiation at RT leads to the formation only of the ε -FeSi phase, and after thermal annealing the Fe layer is transformed to a mixture of ε -FeSi, Α-FeSi2 and β -FeSi2 phases. The Raman signals for β -FeSi2 are slightly shifted toward lower energies. A PL measurement at 12 K indicates a luminescence peak localized at the energy of about 0.81 eV corresponding to the band gap energy of β -FeSi2 phase.
Presentation: poster at E-MRS Fall Meeting 2005, Symposium F, by Ayache Rachid
See On-line Journal of E-MRS Fall Meeting 2005
Submitted: 2005-03-31 13:55 Revised: 2009-06-07 00:44