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- Aivar Tarre

e-mail:
phone: +372-7-374614
fax: +372-7-383033
web:
interest(s): atomic layer deposition, metal oxides, thin films, semiconductor gas sensors

Affiliation:


Institute of Physics, University of Tartu

address: Riia str. 142, Tartu, 51014, Estonia
phone:
fax:
web:

Participant:


E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:

E-MRS Fall Meeting 2007

ALD of Cr2O3 on sapphire

Publications:


  1. ALD of Cr2O3 on sapphire
  2. Raman characterization of strain in epitaxial Cr2O3 films on sapphire



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