Sonia De Angelis

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interest(s):

Affiliation:


Dipartimento di Fisica, Politecnico di Torino

address: corso Duca degli Abruzzi, 24, Torino, 10129, Italy
phone: 0039 011 5647349
fax: 0039 011 5647399
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Affiliation:


ETC srl

address: Z.I. Pantano D’Arci, Catania, 95030, Italy
phone: +39095523242
fax: +39095533241
web:

Affiliation:


Material and Microsystems Laboratori-χ Lab

address: Palazzo “L.EINAUDI”, Lungo Piazza d’Armi, Chivasso, , Italy
phone:
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web:

Participant:


E-MRS Fall Meeting 2005

began: 2005-09-05
ended: 2005-09-09
Presented:

E-MRS Fall Meeting 2005

IN SITU ETCHING TREATMENTS OF EPITAXIAL LAYER BY USING DIFFERENT GAS COMPOSITION FOR MORPHOLOGICAL QUALITY IMPROVEMENT OF THE SURFACES.


Publications:


  1. IN SITU ETCHING TREATMENTS OF EPITAXIAL LAYER BY USING DIFFERENT GAS COMPOSITION FOR MORPHOLOGICAL QUALITY IMPROVEMENT OF THE SURFACES.




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