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dr Peter N. Heys

e-mail:
phone: +44-151-3342774
fax: +44-151-3346422
web:
interest(s):

Affiliation:

Epichem Ltd

address: Power Road, Bromborough, CH623QF, United Kingdom
phone:
fax:
web: http://www.epichem.com/

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:

Publications:
  1. Recent development in the design of cyclopentadienyl-based precursors for the ALD of high-κ thin films



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