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dr Poul-Erik Hansen

e-mail:
phone: +45-0-45931144
fax: +45-0-45931137
web:
interest(s):

Affiliation:

Danish Fundamental Metrology

address: Matematiktorvet 307, Copenhagen, 2800, Denmark
phone: +45-0-45931144
fax: +45-0-45931137
web: http://www.dfm.dtu.dk

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Fast hybrid scalar and Fourier modal method for scatterometry with least square measurements validation

Publications:
  1. Fast hybrid scalar and Fourier modal method for scatterometry with least square measurements validation



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