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- Stefan Nawka

e-mail:
phone: +49-351-8868368
fax: +49-351-8867312
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Affiliation:

Qimonda Dresden

address: Königsbrücker Straße 180, Dresden, 01099, Germany
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Affiliation:

Dresden University of Technology, Institute of Semiconductors and Microsystems

address: Nöthnitzer Straße 64, Dresden, 01187, Germany
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Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Characterization of the initial growth of hafnium silicate films in dependence of process parameters and substrate materials

Publications:
  1. Characterization of the initial growth of hafnium silicate films in dependence of process parameters and substrate materials



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