Lauri Niinisto

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Affiliation:


Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo

address: , Helsinki, , Finland
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Participant:


E-MRS Fall Meeting 2003

began: 2003-09-15
ended: 2003-09-11
Presented:

E-MRS Fall Meeting 2003

Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics

Publications:


  1. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
  2. Atomic layer deposition as a tool for tailoring adhesion properties of interfaces.
  3. Low temperature ZnMnO by ALD
  4. ZnMnO Films grown by Atomic Layer Deposition with uniform Mn distribution



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