Kunyuan Gao

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Affiliation:


Universität Erlangen-Nürnberg, Institut für Technische Physik II

address: Erwin-Rommel-Str. 1, Erlangen, 91058, Germany
phone: 49-(0)9131-852-8319
fax: 49-(0)9131-852-7889
web: http://www.tp2.uni-erlangen.de/index.html

Participant:


E-MRS Fall Meeting 2005

began: 2005-09-05
ended: 2005-09-09
Presented:

E-MRS Fall Meeting 2005

The interface of atomic layer deposited Al2O3 on silicon


Publications:


  1. The interface of atomic layer deposited Al2O3 on silicon




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