Search for content and authors
 

dr Jaakko Niinistö

e-mail:
phone: +358-50-3210548
fax: +358-9-19150198
web:
interest(s):

Affiliation:


Department of Chemistry, University of Helsinki

address: A. I. Virtasen aukio 1, Helsinki, FIN-00014, Finland
phone: +358-9-19150207
fax: +358-9-19150198
web:

Participant:


E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:

E-MRS Fall Meeting 2007

ALD of ZrO2 Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors

Publications:


  1. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
  2. ALD of ZrO2 Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors



Google
 
Web science24.com
© 1998-2024 pielaszek research, all rights reserved Powered by the Conference Engine