Search for content and authors
 

- Jan Musschoot

e-mail:
phone:
fax:
web:
interest(s):

Affiliation:

Ghent University

address: Krijgslaan 281, Gent, 9000, Belgium
phone: +32-9-2644423
fax: +32-9-2644983
web: http://www.quantum.ugent.be

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
A comparison of thermal and plasma enhanced ALD of TiO2 and TiN

Publications:
  1. A comparison of thermal and plasma enhanced ALD of TiO2 and TiN



Google
 
Web science24.com
© 1998-2024 pielaszek research, all rights reserved Powered by the Conference Engine