tilo baumbach

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Affiliation:


Forschungszentrum Karlsruhe, Institut für Nanotechnologie

address: Herrmann-von-Helmholtz-Platz 1, Karlsruhe, 76344, Germany
phone: +497247826377
fax: +497247826368
web:

Participant:


E-MRS Fall Meeting 2003

began: 2003-09-15
ended: 2003-09-11
Presented:

E-MRS Fall Meeting 2003

X-ray imaging of semiconductor micro- and nanostructures in real and reciprocal space

Participant:


E-MRS Fall Meeting 2004

began: 2004-09-06
ended: 2004-09-10
Presented:

E-MRS Fall Meeting 2004

X-ray imaging for applied and industrial research - applications in microelectronics and in micro system technology

Publications:


  1. X-ray imaging for applied and industrial research - applications in microelectronics and in micro system technology
  2. X-ray imaging of semiconductor micro- and nanostructures in real and reciprocal space



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