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Michal Wiatroszak

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Affiliation:


Institute of Electron Technology

address: al. Lotników 32/46, Warszawa, 02-668, Poland
phone: (4822)5487792
fax: (4822)8470631
web: http://www.neti.ite.waw.pl

Publications:


  1. TaSiN, TiSiN and TiWN diffusion barriers for metallization systems to GaN



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