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Volodymyr F. Machulin

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Affiliation:

V.Lashkaryov Institute of Semiconductor Physics NAS Ukraine

address: Nauky prosp., Kyiv, 03028, Ukraine
phone: 265-40-20
fax: 265-83-42
web: http://www.isp.kiev.ua

Affiliation:

V.E.Lashkarev Institute of Semiconductor Physics of NAS of Ukraine

address: 45 Nauky Prospekt, Kyiv, 03028, Ukraine
phone:
fax:
web: http://www.isp.kiev.ua

Publications:
  1. Diffusion barrier properties of reactively sputtered W-Ti-N thin films
  2. Structural analysis of reactively sputtered W-Ti-N thin films



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