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Andrzej Turos

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Affiliation:

Soltan Institute for Nuclear Studies

address: Hoża 69, Warszawa, 00-681, Poland
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Affiliation:

Institute of Electronic Materials Technology

address: Wólczyńska 133, Warszawa, 01-919, Poland
phone: 22 835 30 41
fax: 22 834 90 03
web: http://www.itme.edu.pl

Publications:

  1. Investigation of insulated buried layers obtained by ion implantation in AlGaAs with various Al concentration

  2. TaSiN, TiSiN and TiWN diffusion barriers for metallization systems to GaN
  3. Thermally stable Ru-Si-O gate electrode for AlGaN/GaN HEMT
  4. X-ray study of quartz single crystals implanted with fast Ar ions



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