Pressure estimation in quartz ampoule in during InP synthesis by HGF method, on the base temperature distribution measureent.

Andrzej Materna 1Zbigniew Rudolf 2Marek Orzyłowski 2

1. Institute of Electronic Materials Technology (ITME), Wólczyńska 133, Warszawa 01-919, Poland
2. Industrial Institute of Electronics (PIE), Dluga, Warszawa 00-241, Poland

Abstract

The aim of this work was the estimation of P pressure during InP synthesis process, by HGF (Horizontal Gradient Freeze) method in quartz reactor. It was done in high pressure, multizone computer control furnace. Design of the furnace and P pressure control in quartz reactor by temperatur profile control in furnace are described. Results of temperature measurements in phosphorus zone of reactor and their influence on evaporation dynamics are desired to obtain safety process of InP synthesis.

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Presentation: Poster at Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth, by Andrzej Materna
See On-line Journal of Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth

Submitted: 2007-01-28 16:43
Revised:   2007-02-06 11:36
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