TEM Characterization of Thin-Layered Materials
Polish Academy of Sciences, Institute of Metallurgy and Materials Sciences (IMIM PAN), Reymonta 25, Kraków 30-059, Poland
The progress in physical vapor deposition techniques opens possibilities to produce more and more complicated multilayer coatings of greatly improved properties. The detail microstructure control of such coating is very important especially as a malfunction or lower than expected properties result. Due to fine features of such systems frequently practically only transmission electron microscopy (TEM) guarantees the required high spatial resolution. This resolution is however realized only on very thin foils which are both a problem to prepare but also to handle.
Presentation: Oral at E-MRS Fall Meeting 2006, Thin-layered materials workshop, by Jerzy Morgiel
See On-line Journal of E-MRS Fall Meeting 2006
Submitted: 2006-08-04 17:49 Revised: 2009-06-07 00:44
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