SiO₂-based thin films with immobilized Ru(II)-tris(4,7-diphenyl-1,10-phenanthrolyne) dichloride/Ru(dpp)₃/ have been produced in order to elucidate the influence of the precursors nature and the production method on their morphology as significant factors for the effectiveness and service time of oxygen sensors.

The morphology of the films deposited in various conditions (varying the number of immersions, withdrawn speed and Ru(dpp)₃ content) is studied by scanning and transmission electron microscopy. The specific surface area and the porosity are determined by krypton adsorption.A smooth, glass-like surface is characteristic for the layer, produced from TEOS. The ormosil-type precursors lead to the formation of "structured" surface and the morphology strongly depends on the hydrocarbon chain length. The presence of the Ru(II) complex changes the morphology. The crystals, specific for the complex are seen on the surface of all the produced layers, appearing above the surface but also "immersed" in the matrix volume. The data from X-ray energy-dispersive microanalysis show that the mole ratio Si/Ru in the dots is~24 and ~121 outside them. The X-ray photoelectron spectroscopy results confirm the presence of Ru(IThe influence of storage of the films in distilled water, HCl or HNO₃ solutions (pH 2 and 4), NaOH solution (pH 8) and in beer for 2160 hours (90 days) on the films morphology is studied also. As can be expected the alkali solution disturbs the surface rather significantly.

The study is performed by the financial support of the Bulgarian Scientific Investigation Fund under Contract VUH-005/2005.

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