We have demonstrated the growth of ZnO thin films with c-axis (002) orientation at room temperature on Si(100), SiO2, and amorphous ZnO substrates by the radio frequency (RF) magnetron sputtering method. We investigated the structural properties of ZnO thin films deposited on various substrates with varying the RF power. X-ray diffraction analysis revealed that increasing the RF power helped to decrease the compression stress and to increase the grain size, regardless of the substrate material. Scanning electron microscopy indicated that the structural morphology of the ZnO films were not dependent on the substrate material.

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/716 must be provided.

1. Fabrication of Metal-Shelled Coaxial Nanowires and Annealing-Induced Formation of Metal Nanoparticles for Catalytic Applications
2. Fabrication and Raman Studies of Core-Shell Heteronanowires
3. Crystaline Bi₂O₃ nanofibers fabricated on sapphire substrates using a trimethylbismuth and oxygen mixture
4. Growth and characterization of doped Ga₂O₃ and SnO₂ nanofibers using GaN and Sn powder mixtures
5. SnO₂/SiO_x core-shell nanoneedles