Surface morphology, nanomechanical and tribological behaviours of ultrathin nitride superlattice films.
|HANNA WRZESIŃSKA , M. Ekwińska 2, M. Misiak 2, Z. Rymuza 2, S.A. Chizhik 1|
1. Belarusian State University (BSU), F. Skaryna av. 4, Minsk 220050, Belarus
Superlattice films made of TiN, CrN, NbN nitrides deposited on n-type single crystal silicon without or with interlayers of silicon dioxide or silicon nitride were studied. The superlattice films with thickness below 200 nm were deposited by PVD technique.
Presentation: poster at E-MRS Fall Meeting 2003, Symposium B, by HANNA WRZESIŃSKA
See On-line Journal of E-MRS Fall Meeting 2003
Submitted: 2003-05-05 08:36 Revised: 2009-06-08 12:55