Metallic Thin Film Composites with Shape Memory Alloys for Microswitches and Tactile Graphical Displays
|Roman Vitushinsky 2, Fadila Khelfaoui 1, Sam Schmitz 2, Nikolai Botkin 2, Bernhard Winzek 2|
1. Univ.Bonn, Bonn, Germany
According to the European recommendation 2000/78/EG, barrier-free access to electronic media has to be realized for visually impaired persons. While text files are presented by Braille cells or acoustically, the realization of graphic displays still requires huge technological expense and high costs. Further improvement is possible by shape memory alloy (SMA) actuators which provide the highest work output of the so-called smart materials. In particular, thin film SMA actuators are of special interest, since they provide much higher actuation frequencies than bulk actuators due to their high surface to volume ratio. In combination with other metallic films, SMA-composites show the two-way behavior right after deposition and annealing treatment. The work output upon the martensitic transformation is about ten times larger than the bimetallic effect. The corresponding actuators can be fabricated by cost effective parallel batch processing including magnetron sputtering and photolithographic structuring.
Presentation: oral at E-MRS Fall Meeting 2005, Symposium C, by Roman Vitushinsky
See On-line Journal of E-MRS Fall Meeting 2005
Submitted: 2005-05-19 09:19 Revised: 2009-06-07 00:44