Modification of the nanostructure of the amorphised Si near-surface layer |
Dorota Klinger 2, Elżbieta Łusakowska 2, Danuta Żymierska 2, Bolesław Kozankiewicz 2, Lech Nowicki 1, Anna Stonert 1, Julian Auleytner 2 |
1. Soltan Institute for Nuclear Studies, Hoża 69, Warszawa 00-681, Poland |
Abstract |
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