The idea and realisation of the novel electron spectromicroscope DEEM equipped with 5keV electron gun and recently obtained experimental results are reported for the first time. The original DEEM concept of the combination of two parallel imaging columns with a lens system of spherical beam deflectors allows for the simultaneous observation of the two different electron optical planes - selective area diffraction plane (angular distribution) and imaging plane - at two independent imaging units. The dispersive properties of the deflector are used for the selection of the energy range of the emitted electrons. This feature is especially useful if the energy of the illumination radiation is high enough to cause emission of the core level electrons from the sample. As a consequence, energetically and laterally resolved measurements and imaging are possible.

The novel idea of the sample illumination with a high energy (5keV) electron primary beam allows for electron microspectroscopy and electron spectromicroscopy measurements under laboratory condition. A plurality of contrast mechanisms and techniques is used for imaging, including chemical contrast (nanometric imaging- ESCA), AES, energy and laterally selective diffraction, work function contrast, selected area electron spectroscopy etc. An example of selected area electron spectroscopy and energy selective imaging with secondary electrons for a Pd/Si test sample are presented for the first time.

Keywords: imaging nanoscale ESCA, electron spectroscopy, spectromicroscopy, XPEEM, AES

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1. Spektromikroskop Elektronowy DEEM