The availability of intense, focused synchrotron x-ray microbeams has enabled new techniques for materials investigations with sub-micron spatial resolution. The scanning microbeam setup we have developed at the UNI-XOR beamline at the Advanced Photon Source (APS) is versatile in that it provides 3D scans (including depth resolution), and can alternate between polychromatic- and monochromatic-beam modes. Focusing in both modes uses elliptical Kirkpatrick-Baez (K-B) reflecting mirrors. Beam diameters of ~400 nm FWHM are now routine, and 90 nm focus has been demonstrated. In white-beam mode, a CCD detector records a complete Laue diffraction pattern, which is analyzed with an automated indexing program. These diffraction patterns provide real-space maps of the local lattice structure, crystal orientation, grain morphology, and strain tensor. In monochromatic mode, individual diffraction peaks are monitored while scanning the x-ray energy to provide absolute lattice parameter measurements.

This presentation will illustrate the application of polychromatic scanning x-ray microscopy with examples from 1D, 2D and 3D materials systems. Using 1D ZnO nanorods, we have mapped the structure, orientation and lattice perfection along individual nanostructures as small as 200 nm diameter. Using deposited 2D thin films, x-rays studies have revealed the mechanisms for local crystallographic tilting in two different systems: epitaxial cerium oxide films grown on textured Ni substrates for superconducting applications, and pendeo-epitaxial GaN films grown on Si substrates. 3D materials investigations have included studies of thermal grain growth in polycrystalline aluminum and phase separation in multiferroic (Eu,Y)MnO₃ manganite single-crystals.

Support by DOE Office of Science, Division of Materials Sciences under contract with ORNL, managed by UT-Battelle, LLC; XOR/UNI beamline supported by ORNL, UIUC-MRL, NIST, UOP and DOE-BES; APS supported by DOE.

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